TFLT衬底
- Items
- Specification
- Diameter
- 150±0.2mm
- LN Crystal Orientation
- X°±0.3°
- LN Layer Thickness
- (300~600nm)±20nm
- Front Side Surface Finish
- <0.5nm
- Buried Oxide Layer Thickness
- (500~8200nm)±20nm
- SI Orientation
- <100>
- TTV
- ≤5μm
- BOW
- -40~40μm
- Warp
- ≤50μm
- Total Thickness
- 675±25μm
6寸 TFLN衬底
- Items
- Specification
- Diameter
- 150±0.2mm
- LT Crystal Orientation
- X°±0.3°
- LT Layer Thickness
- (300~600nm)±20nm
- Front Side Surface Finish
- <0.5nm
- Buried Oxide Layer Thickness
- (500~8200nm)±20nm
- SI Orientation
- <100>
- TTV
- ≤5μm
- BOW
- -40~40μm
- Warp
- ≤50μm
- Total Thickness
- 675±25μm
8寸 TFLN衬底
- Items
- Specification
- Diameter
- 200±0.2mm
- LN Crystal Orientation
- x°/Y36°±0.3°
- LN Layer Thickness
- (300~600nm)±20nm
- Front Side Surface Finish
- <0.5nm
- Buried Oxide Layer Thickness
- (500~8200nm)±20nm
- SI Orientation
- <100>
- TTV
- ≤5μm
- BOW
- -50~50μm
- Warp
- ≤50μm
- Total Thickness
- 725±25μm