超平坦Si片
- Items
- Specification
- Diameter
- 150±0.2mm
- Sl Orientation
- <111>/<100>/<110>等
- Si Type
- P/N
- TTV
- ≤0.5μm
- Front roughness
-
Ra≤0.2nm
(5μm*5μm)
- Items
- Specification
- Diameter
- 200±0.2mm
- Sl Orientation
- <111>/<100>/<110>等
- Si Type
- P/N
- TTV
- ≤0.5μm
- Front roughness
-
Ra≤0.2nm
(5μm*5μm)
