POI-声学级LTOI衬底 (智能剥离)
- Items
- Specification
- Diameter
- 150±0.2mm
- LT Crystal Orientation
- Y42°/Y50°±0.3°
- LiTaO3 Layer Thickness mean
- (300~1000)±20nm
- LiTaO3 Layer Thickness Range
- <40nm
- Front Side Surface Finish
- <0.5nm
- Buried Oxide Layer Thickness mean
- (300~1000)±20nm
- Buried Oxide Layer Thickness range
- <40nm
- Trap-Rich Layer Average Thickness
- (0.5~1.5μm)±0.1μm
- SI Orientation
- <100>,<111>
- TTV
- ≤5μm
- BOW
- ±50nm
- Wap
- <50μm
- Total Thickness
- 675±25μm
POI-声学级LTOI衬底(减薄)
- Items
- Specification
- Diameter
- 150±0.2mm
- LT Crystal Orientation
- Y42°/Y50°±0.3°
- LiTaO3 Layer Thickness mean
- (2~50)±0.5um
- LiTaO3 Layer Thickness Range
- <2um
- Front Side Surface Finish
- <0.5nm
- SI Orientation
- <100>,<111>
- TTV
- ≤5μm
- BOW
- ±50nm
- Warp
- <50μm
- Total Thickness
- 675±25μm